Piezoceramic Microstructures


Array aus PZT Kegeln
Regular array of PZT cones
PZT microstructures for high resolution ultrasonic transducers

Batch production of fine scaled piezoceramic components with defined alignment is of great interest for many sensor and actuator applications.

The soft-mold-process developed at the Fraunhofer IKTS allows for cost-effective production of piezoceramic microstructures with high aspect ratio (6:1). Depending on the master mold design arrays of regular or irregular arranged piezoceramic components (cuboidal, cylindrical, and cone-shaped) can be formed via slip casting. Microstructures based on lead zirconate titanate (PZT) with edge lengths between 20 µm and 1000 µm and a maximum height of 500 µm could be prepared so far.


Services offered


  • Preparation of piezoceramic microstructures for sensor and actuator applications
  • Development of high  frequency ultrasonic transducers on the base of 1-3 piezocomposites
  • Characterization of piezoceramic transducers


Technical Equipment


  • Slip preparation: planetary ball mills, agitated ball mills, roller mills, stirrer
  • Molding: vacuum infiltration equipment
  • Composite preparation: polymer infiltration equipment, lapping and polishing machines, sputter coater, screen-printer with semi-automatic positioning system
  • Characterization: rheometer, microscopes, low signal measurements (dielectric constant, dielectric loss factor, electromechanical coupling coefficient), high signal measurements (ferroelectric hysteresis, voltage-deflection-curves, blocking forces, vibration behaviour), scanning laser vibrometer