Piezoceramic Thick Films


PZT thick film actuators on LTCC for adaptive mirrors (cooperation Fraunhofer IOF)
Deformation eines adaptiven Spiegels
Deformation of an adaptive mirror

Piezoceramic thick films based on lead zirconate titanate (PZT) are of great interest for cost-effective fabrication of integrated sensors and actuators for MEMS (Micro Electro Mechanical Systems) and high frequency ultrasonic transducers.

The Fraunhofer IKTS has been developed a unique technology for preparation of piezoceramic thick films on microelectronic substrates like ZrO2, Al2O3, Silizium und Low Temperature Cofired Ceramics (LTCC). PZT thick films with bottom and top electrodes can be prepared using the screen-printing process. They show superior dielectric and electromechanical properties.

In comparison to assembling techniques the screen-printing process exhibits the following advantages:

  • Application of freely structured thick films
  • Process technologically established
  • Rigid coupling to substrate material
  • High interface reliability
  • Miniaturization feasible


Services offered


Development and application of piezoceramic thick films for sensors and actuators in:

  • MEMS
  • Mikrofluidics (pumps), valves
  • Adaptive optics
  • Ultrasonic transducers
  • Positioning systems
  • Pressure sensors, force sensors


Technical Equipment


  • Paste fabrication: grinding aggregates, planetary ball mills, roller mills, vibration mills, three roll mills
  • Thick film technology: screen-printer with semi-automatic positioning system, contact-free and non-destructive topography, profile and thickness measurement
  • Characterization: rheometer, microscopes, low signal measurements (dielectric constant, dielectric loss factor), high signal measurements (ferroelectric hysteresis, voltage-deflection-curves, blocking forces, vibration behaviour), scanning laser vibrometer