Sensors

Ceramic based multilayer technology allows for the integration of sensory functions as well as for electronic circuits. One example is the fabrication of deformable bodies, which are used to detect mechanical quantities (e.g. pressure, acceleration, force). Ceramic materials are qualified for these applications because of their almost linear tension/strain behavior. The detection of the deformation takes place with different measurement principles (e.g. piezo-resistive, piezo-electrical, and capacitive sensory structures). This requires the integration of corresponding functional thick films. The high flexibility in structuring the LTCC enables for the manufacturing of fluidic applications with integrated channels and cavities.