Flow sensors


External flow sensor
Integrated flow sensor element – opened for demonstration

IKTS has developed flow sensors based on heating-wire-anemometry. Compared to commercial solutions the ceramic multilayer technology allows for a cost-efficient multiple panel processing for higher quantity production. More advantages of these components are the inherent robustness, high temperature stability and the high resistance to aggressive media.

Fraunhofer IKTS developed a flow sensor with a freestanding sensitive element integrated in a ceramic channel. Gas flows through the ceramic sensor and customized electronics measure its velocity immediately (see Figure 1).

Figure 2 shows our developed flow sensor element which is designed as an external measuring element with integrated temperature sensors. The material is HTCC, which allows measurement in high gas temperatures up to 600 °C. Applications, like measuring the gas volume in an Exhaust Gas Recirculation (EGR) in automotive are predestinated for such robust flow sensors.


Technical characteristics:


External (internal) measuring element:

  • Gas temperature: up to 600 °C  (100 °C)
  • Flow velocity range: 0-50 m/s (0-15 m/s)


Services offered:


  • Development of sensory solutions for flow measurement of different media and adaption to the respective measuring conditions (flow velocity, volume and mass flow)