Fraunhofer Institute for Ceramic Technologies and Systems IKTS
IR-picture of a ceramic ring heater in LTCC multilayer technology (left: end of heating impulse; middle: 1s after beginning of a heating impulse; right: 2s after beginning of a heating impulse).
LTCC ring heater: front (left) and back side (right).
The demonstrated heater has 8 temperature sensors on top and two heating layers beneath. They are arranged in eight concentric heating circles. The geometric design of every single heating circle with optimized area arrangement is a simulation result with given parameters. Internal printed wiring connects temperature sensors and heaters with the pads on the backside.
Technical characteristics:
- 8 temperature sensors (1000 Ω) on top,
- 16 heaters on top of two buried layers,
- 96 pads on bottom,
- Outer diameter 72 mm,
- Thickness 2 mm, border area 1 mm thick,
- Mechanical stabile at high temperature gradients and heating rates:
- Temperature gradient up to 350 K/mm,
- Heating rates up to 7000 K/s.