LTCC-heaters in matrix configuration

The use of ceramic multilayer technology allows the realization of a high dynamic and efficient heating process to heat local spots on a surface (Figure 1).

The realized Heating Matrix has 64 individual and controllable heating spots in a selectable form (see figure 4). The diagram in figure 3 shows the results of a heating process of one spot for 0.5 s and its influence on nearby spots.

Furthermore, the multilayer technology enables the monolithic integration of cooling structures. This enables for an additional variance, which has an impact on the temperature gradient.

Technical characteristics:

• Heating Matrix dimensions (50 x 50 x 2) mm³
• 8 x 8 temperature sensors (1000 Ω) on the surface
• 8 x 8 integrated heaters (pattern 5.2 mm, 3 W (one spot))
• 256 electrical contacts on backside
• Mechanical stability at high temperature gradients and heating rates:
  • Temperature gradient up to 350 K/mm
  • Heating rates up to 7000 K/s