Printed flexible magnetoresistive sensors

Topic

Fraunhofer IKTS develops printable magnetoresistive (MR) sensors on flexible (polymer tapes, paper) and rigid (ceramics) substrates. Using printing methods allows better scalability, easier integration, and reduced costs of the sensors manufacturing as compared to PVD technology and lithography. This also enables large-area sensor arrays and mechanically flexible sensors. Realizing certain types of MR sensors on ceramic substrates shows potential for their applications at temperatures higher than 200°C.

 

Key features of the technology
 

  • Manufacturing relying on printing methods (screen-/dispenser/inkjet) in combination with diode laser array post-processing
  • Processing in air, no need for vacuum technology, PVD and lithography
  • Realization on Kapton (PI), PET, paper, ceramic substrates and stretchable polymer substrates
  • Low total thickness of the sensors (including substrate, sensing layer, contacting and encapsulation): < 200 µm (demonstrated), < 100 µm (in development) as a key for applications in wearables and air gaps of electrical machines
  • Large area, simple realization of sensor arrays
  • Mechanical flexibility

 

Specifications of the sensors
 

Ordinary or large magnetoresistive effect (Bismuth-based sensors)

  • Non-critical, cost-efficient, non-toxic material
  • High effect, large fields (0.1-7 T), no saturation: 8 % (0.5T, RT), 146 % (5 T, RT), > 4000 % (7 T, 5 K)
  • Resolution: 14 µT (0.1 T), 2.8 µT (>1 T)
  • Linearity above 300 mT, > 2000 bending cycles
  • Potential applications: direct magnetic flux measurements in electrical machines, contactless switches

Anisotropic magnetoresistive (AMR) effect (sensors based on permalloy, Ni80Fe20)

  • Sub-mT to 10 mT: AMR effect 0.5-0.8 %, resolution 300 nT/√Hz
  • AMR Wheatstone-bridge: 180° angle detection, compensation of temperature effects and mechanical strains
  • > 30,000 bending cycles, stretchability proven
  • Potential applications: contactless switches, human-machine interfaces
© Fraunhofer IKTS

Services offered
 

  • Cost-efficient, scalable, high-throughput sensor fabrication methods
  • Additive manufacturing for high integrability into components
  • Mechanically flexible magnetic field sensors
  • MR-sensors on ceramics for temperatures > 200°C
  • MR-sensor arrays for 2D-position measurements
  • Partnership in collaborative research projects, performing feasibility studies, preparing prototypes and demonstrators, providing verification samples

 

Publicatons
 

  • M. Vinnichenko, N. Trofimenko, V. Sauchuk, S. Mosch, M. Fritsch, M. Kusnezoff, J.-I. Mönch, G.S.C. Bermudez, D. Makarov. Method for producing a printed magnetic functional element and printed magnetic functional element. Patent EP4010913 (intention to grant announced 25.06.2025).
  • C. Voigt, M. Fritsch, M. Vinnichenko, M. Kusnezoff. Flexible und gedruckte anisotrope magnetoresistive Sensoren zur Positions- und Rotationsmessung. AMA Proceedings, 17. Dresdner Sensor-Symposium 2024, 217-221. (Link)
  • C. Voigt, S. Mosch, E. S. Oliveros-Mata, D. Makarov, C. Schubert, M. Ott, T. Preußner, M. Vinnichenko. Printed Anisotropic Magnetoresistive Sensors on Flexible Polymer Foils. Proceedings 97, 117 (2024). (Link)
  • E. S. Oliveros-Mata, C. Voigt, G. S. Cañón Bermúdez, Y. Zabila, N. Valdez-Garduño, M. Fritsch, S. Mosch, M. Kusnezoff, J. Fassbender, M. Vinnichenko, D. Makarov. Dispenser Printed Bismuth-Based Magnetic Field Sensors with Non-Saturating Large Magnetoresistance for Touchless Interactive Surfaces. Adv. Mater. Technol. 7, 2200227 (2022). (Link)

 

Further information
 

Collaborations: Helmholtz-Zentrum Dresden-Rossendorf (HZDR), Fraunhofer FEP