Optical test systems and diagnostics

Technical infrastructure

Lateral high-resolution ellipsometer

 

  • Spectral range: 220–980 nm
  • Angle of incidence: 55°–75°
  • Measuring point size: 40 x 75 mm
  • Thickness accuracy: 0.05 nm
  • Refraction index accuracy: 0.005

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System for electron irradiation of surfaces

 

  • Device: EBLab 200 (Ebeam Technologies, Switzerland)
  • Voltage range: 70–200 kV
  • Maximum power: 2.25 kW
  • Maximum beam current: 1–20 mA (voltage-dependent)
  • Sample transportation velocity: 3–30 m/min
  • Sample size: DIN A4 (216 x 297 mm), adjustable in height up to 50 mm (in steps of 5 mm)
  • Nitrogen inertion: minimum oxygen concentration (< 50 ppm)

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Electron beam dosemeter

 

  • Maximum sample size: 300 x 300 x 330 mm3
  • Resolution, lateral: 200 µm
  • Dose dynamic range: 0–250 kGy
  • Dose resolution:
    • up to 80 kGy: 1 kGy
    • from 80 kGy: 5 kGy
  • Measurable 3D profiles: automated, per software update customizable

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Automated optical tomograph

 

  • Resolution, axial: 3 µm
  • Resolution, lateral: 8 µm
  • Velocity: up to 200 mm/s
  • Measurement range: 200 x 200 mm
  • Measurement frequency: 30 kHz

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