Nanocorundum (α-Al2O3)

Topic

Pulversynthese

SEM micrograph of nano-corundum: monodispersed spherical particles.

nakor1_k
nako3_k

New excellence in quality, availability and price by advanced syntheses

Associated with an adjusted use of precursors and seeding approaches, a special temperatur/time regime of the controlled hydrolysis enables the direct formation of gamma-Al2O3 from a quasiamorphous intermediate at 400-600°C and, finally, a transformation to corundum completed at low temperatures > 750°C.

 

Advantages

 

  • Use of common, inexpensive raw materials (e.g. Al-nitrate), processes that can be run automatically
  • Options: aqueous/inorganic and alcoholic/organic;
  • Batch sizes large for subsequent technological development
  • Transformation to corundum at low temperature of about 800°C provides redispersible nanopowders
  • Average size of redispersed calcined and ground particles >25 nm

 

Products and services offered

 

  • Development of syntheses for nanocorundum with requested properties
  • Upscaling investigations
  • Developments for the processing of nanocorundum to produce
    • porous coatings (membranes) and compacts
    • dense and porous coatings on metallic substrates
    • dense sintered compacts; options for sol/gel or powder technological approaches

Nanocorundum for chemical-mechanical polishing (CMP)

Taking advantage of physical properties of α-Al2O3

Nanokorund_TEMgr

TEM evidence of the low degree of agglomeration of nanocorundum particles.

2Nanokorund_dia_Polierleistung-3

Polishing power of corundum (-> max. density and hardness) compared with conventional polishing alumina grades; data by Her et al. 1999.

Chemical-mechanical polishing of deposited thin oxide and metallic layers is a global key technology in the manufacture of highly integrated circuits. Whereas the chemical effect of the medium is imperative it is, on the other hand, also important to avoid corrosion damages. Thus, the properties of the polishing particles are responsible for associating high polishing rates with an outstanding quality of the materials removal process.

 

Advantages

 

  • Very high hardness of α-Al2O3
  • Isometric shape of particles
  • Adjustable particle sizes in the nano-range
    (d50 ~ 30-100 nm)
  • High polishing rate with excellent surface quality

 

Products and services offered

 

  • Consulting service for potential application at customer
  • Evalution of the performance of new nano-α-Al2O3 slurry systems
  • Joint projects aiming for new products