Thin films and coatings


Fig. PECVD-tool substrate size < 480x480 mm.

Thin films


Oxide films
Transparent, conductive zinc oxide is a promising material for many applications in the electronic and solar industry. The electronic and optical properties are adjustable by selective choice of the chemical precursor and optimized process parameters.

Non-oxide films

Based on specific precursors containing silicon, titanium or zinc further thin films with different characteristics are available. Silicon layers with different degree of crystallinity from amorphous to microcrystalline (a-Si, nc-Si and µc-Si) can be deposited by chemical vapor deposition on several substrates (e.g. glass, polymer). Additionally, amorphous silicon carbide layers (SiCx) with diffent Si to C ratio are developed and characterized.

Services offered

  • Specific modification of liquid precursors
  • Optimization of process parameters
  • Up-scaling and transfer to semi-industrial scale
  • Multiple materials with several deposition methods
  • Film thickness from nano- to micrometer scale
  • Films with adjustable degree of crystallinity (amorphous, nanocrystalline, microcrystalline)

Technical equipment

  • PE CVD tool: substrate sizes < 19 inch; temperature < 450°C
  • Spin coater: substrate size < 4 inch; temperature < 1000°C; speed up to 7000 rpm; inert atmosphere
  • Hot plate: substrate size < 4 inch; temperature < 900 °C @ 70 K/min; inert atmosphere
  • Motorized dip coater; Inert atmosphere


  • Functional layers in solar cells (TCO, absorber, barrier and ARC)
  • TCO layers for electronics


sinterkornd beschichtunggr1
Tight sub-µm coating (corundum on steel).
sinterkornd beschichtunggr2
Mesoporous corundum coating on steel (pores 40 nm).

Sub-µm sintered corundum coatings on metal


Deposited porous catalyst substrates and dense wear resistant coatings consisting of pure corundum

Highly perfect functional or protective coatings, e.g. on steel, are annealed after homogeneous deposition of very fine corundum particles, e.g. from the IKTS-synthesis of NanoCorundum.


  • High chemical and thermal stability of corundum
  • For dense protective coatings: high hardness and wear resistance of Al2O3 ceramics with sub-µm grain size
  • For porous functional coatings: pore shape close to isometric (avoiding slit-shaped pores with high tortuosity as they are typical for transitional alumina coatings)
  • Application of known coating approaches (electrophoresis) and of commercial raw materials is possible
  • Options: a new quality avoiding flaws and providing thicker coatings by powder technology or deposition from sols

Products and services offered

  • Development of technologies to manufacture sintered dense and porous corundum coatings with sub-µm microstructure on metals
  • Development of optimized materials for specific applications
  • Development of special microstructures and properties by laser sintering of deposited coatings (cooperation with Laser Institute at University of Applied Sciences Mittweida)