Fraunhofer Institute for Ceramic Technologies and Systems IKTS
X-ray system for characterization of microsystem components.
X-ray image of a ceramic differential pressure measurement system with electronics (detail detectability < 300 nm).
With the help of the Cheetah EVOplus X-ray system (YXLON International GmbH), we can non-destructively inspect manufactured microsystem components for defects or damage and thus perform well-founded defect analyses. Due to the flexible software and the large inspection area of 460 x 410 mm, both large components and many smaller components can be analyzed and evaluated simultaneously. The integrated calibration routines ensure automated transfer of the measured values to protocols.
Technical data
- Inspection area: 460 mm x 410 mm
- Maximum component size: 800 mm x 500 mm
- Tube type (open) up to 160 kV at 1 mA
- Tube power 64 W with a target power of 15 W
- Detail detectability: < 300 nm
- Maximum geometric magnification: 3000x
- Oblique view of samples: ± 70°
Services offered
- Creation of X-ray microscopy images in perpendicular and oblique transmission
- Analysis and measurement of buried structures
- Defect analysis
- Creation of automated measurement routines for higher quantities
- Creation of measurement and test protocols
- Development of further characterization methods and transfer to the customer